Chozo Ghosts
While Chozo Ghosts can become invisible with combat visor they still stay visible with X-Ray visor, so if you have X-Ray then you should definitely use it. If you have Super Missiles then use one Super for each ghost. One Super missile and a charged Beam shot are enough to finish off a Chozo Ghost. If you have neither of those then the best way to finish of ghosts is by stunlocking them with Charged Beam shots. To do that you first let a Chozo Ghost attack you and dodge its shots. As soon as it tries to dash away shoot your charged power beam and it will fall down on the ground if you hit. Now it might be vulnerable or not depending on when you hit the Chozo Ghost. If you hit it during its attack it will be invulnerable until it starts to dash away. If you hit it just as it starts to dash away or during the dash then it will remain vulnerable. While the ghost gets up you can charge your beam in time and hit it again before it gets away and it will fall down again. Repeat this process until the ghost is dead. It takes 5 Charged Beamshots to finish of a Chozo Ghost. Also stunlocking gets easier if you are walking towards the ghost during the stunlock, but don't forget to dodge other ghosts. If a ghost falls down very far or through the rooms boundaries it will dash to a spot nearby first before it dashes away somewhere far away again. You can use this by waiting until it dashed to the spot nearby and shoot it there. It is also possible to make ghosts appear by shooting at them when they are invisible. So if all the ghosts are invisible you may want to shoot around a little and maybe a ghost will show up. In sunchamber it might happen that a Chozo Ghost flies upwards after getting hit. It is possible to still continue the stun lock, but that makes it a lot harder.
It is also worth to mention that killing a ghost on a very specific frame will make make it dance around for 20 seconds before it vanishes finally vanishes.
JustinDM has a 47 second Ghost Fight that you can watch for a well executed fight.